With the support of:

Scope of the conference

The MNE Conference will address questions concerning micro and nano-fabrication and manufacturing employing lithography and other patterning related approaches, and the use of the resulting structures and devices for scientific research and technological applications. The themes will include:

Photon, Electron and Ion-Based Lithography

Chair – Emanuel Loertscher

Photon lithography:

  • DUV, immersion, EUV, sources, optics, systems, mask technology, alignment, optical proximity correction, lithography modeling, throughput, novel techniques.

Electron and ion beam lithography:

  • Sources, optics, systems, alignment, proximity corrections, e-beam mask writer, ion and electron beam surface interactions, focused electron beam induced deposition (FEBID).

Resists for beam based lithography:

  • Resists, resist structures, resist processes.


  • Inspection, testing, metrology and in-situ process measurements, devices and circuits, reliability.

Micro and Nano Fabrication Methods

Chair – Helmut Schift

Nano-imprint and soft-lithography:

  • Stamp fabrication, processes and imprinting methods, applications, dedicated resists, systems, alignment.

Alternative patterning methods:

  • Scanning probe techniques, 3D lithography, stencil lithography, ink-jet printing, novel fabrication methods, self-assembly and directed self-assembly, block copolymers, combination of top-down and bottom-up processes, surface nano engineering, nanomanipulation, integration of nano-objects, nanoscale modelling, molecular technologies.

Pattern transfer and plasma etching:

  • Nanoscale etching, lithography/etching interactions, etching of new materials, novel etching chemistry, etch damage, deep etching, lateral etching, lift-off, pre-patterned substrates, plating, sputtering/milling, beam etching/deposition, modeling.

Micro and nano manufacturing:

  • Scale-up and transfer to manufacturing, 3D printing, additive techniques, molding, rapid prototyping, multi-scale manufacturing

Micro/Nano Devices for Physical Sciences and their Fabrication

Chair – Michel Calame

  • Nanoelectronics, single electron transistor devices, quantum dots and devices, nano-optics/nanophotonics, plasmonics, nanowire and nanotube based devices, photovoltaics, high density data storage devices, nanomagnetics, molecular devices, carbon nanotube and graphene devices.

Micro/Nano Systems and their Fabrication

Chair – Cosmin Roman

  • MEMS, MOEMS, NEMS, Micro-Optics, RF-MEMS/NEMS, Surface and bulk micromachining, new materials, sensors and actuators, MEMS timekeeping devices, gas sensors, energy harvesters.

Micro/Nano devices for Life Sciences and their fabrication

Chair – Alexandra Homsy

Micro and nanofabrication of fluidic systems:

  • Devices for biology, chemistry, medicine, micro-biodevices, biodetection devices, cell sorting devices, cell/micro-nanostructure interactions, neuronal devices, biochips and lab-on-a-chip, μTAS, BioMEMS, micro-nano fluidic devices for chemical analysis.

Bio-inspired technologies:

  • Bionanomachines, bioassembly of nanomaterials, hybrid devices.



Gold Sponsors
raith logo
Micronarc logo

csem  logo
PSI  logo
Eulitha logo
Elevier  logo
JEOL  logo
JEOL  logo

Silver Sponsors
Tronics  logo
newflare   logo
trumph   logo
empa   logo
Swissphotonics   logo
IBM   logo


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Organising partners:        
  csem logo EPFL logo PSI logo ethz logo
  IBM logo fsrm logo EMPA logo mimotec logo